wafer                package:faraway                R Documentation

_r_e_s_i_t_i_v_i_t_y _o_f _w_a_f_e_r _i_n _s_e_m_i_c_o_n_d_u_c_t_o_r _e_x_p_e_r_i_m_e_n_t

_D_e_s_c_r_i_p_t_i_o_n:

     A full factorial experiment with four two-level predictors.

_U_s_a_g_e:

     data(wafer)

_F_o_r_m_a_t:

     A data frame with 16 observations on the following 5 variables.

     _x_1 a factor with levels '-' '+'

     _x_2 a factor with levels '-' '+'

     _x_3 a factor with levels '-' '+'

     _x_4 a factor with levels '-' '+'

     _r_e_s_i_s_t Resistivity of the wafer

_S_o_u_r_c_e:

     Myers, R. and Montgomery D. (1997) A tutorial on generalized
     linear models, Journal of Quality Technology, 29, 274-291.

